Default Wait Limits

The 9220 vacuum controller uses default wait limits in conjunction with recipe programs. The wait limits are in place to help make sure a recipe will not continue to the next step until the temperature, atmosphere or both are within the specified range. The wait limits are both plus and minus the value of the setpoint specified in the recipe. You can define specific wait limits per program that supersede the defaults with the specific wait limit OP CODE per program (SETWAIT).

 

 

Factory Default configuration:

 

Carbon:

Parameter

Value

Default Wait Limit for Temperature

15

Default Wait Limit for Atmosphere

0.10

 

Dewpoint:

Parameter

Value

Default Wait Limit for Temperature

15

Default Wait Limit for Atmosphere

10

 

%O2:

Parameter

Value

Default Wait Limit for Temperature

15

Default Wait Limit for Atmosphere

1.0

 

MV:

Parameter

Value

Default Wait Limit for Temperature

15

Default Wait Limit for Atmosphere

10

 

Multiloop:

Parameter

Value

Default Wait Limit for Temperature

15

Default Wait Limit for Atmosphere

10

 

Vacuum:

Parameter

Value

Default Wait Limit for Temperature

15

Default Wait Limit for Atmosphere

10

 

IR + Probe:

Parameter

Value

Default Wait Limit for Temperature

15

Default Wait Limit for Atmosphere

10

 

Nitrider:

Parameter

Value

Default Wait Limit for Temperature

15

Default Wait Limit for Atmosphere

1.0

 

%C Dual Temp:

Parameter

Value

Default Wait Limit for Temperature

15

Default Wait Limit for Atmosphere

10