Chapter 4 – OPCODES

Temperature Value Column Atmosphere Value Column Option Value Column

AB_SOAK

N/A N/A Soak Time

This sets a soak time for an autoboost step in a recipe. It must be monitored externally by SSi's realtime carbon diffusion modeling software which will adjust the soak times based on a predefined target model for the specified work.

ABD_Model

N/A N/A Model

This opcode instructs the Real Time Carbon Diffusion (RTCD) program what model to use when the autoboost or autodiffuse is encountered.

AD_SOAK

N/A N/A Soak Time

This sets a soak time for an autodiffuse step in a recipe. It must be monitored externally by SSi's realtime carbon diffusion modeling software which will adjust the soak times based on a predefined target model for the specified work.

ALARM

N/A N/A User Alarm Number

The alarm function is used to notify the operator that an operation is complete or that a manual action is required. By use of the Settings menu screen, up to 99 User Alarms can be assigned, with a short text on each that is displayed during an active alarm condition. The program waits until the alarm is acknowledged to proceed. User Alarm 0 is used to turn off a user alarm. Its function is the same as the acknowledge button.

ATM_INQ

N/A ATM Level Wait, Wait Up, Wait Down

The atmosphere inquiry is used to wait for the actual atmosphere to reach the set point. The default band can be set under the Configuration Menu and is typically 10 (i.e. 0.10 percent carbon).

The SET_WAIT opcode will change the band limit
The LIMIT opcode immediately following this opcode sets a time limit on the wait.
A BRANCH opcode immediately following this opcode can be used to change the program flow based on the inquiry results.

BO_start

N/A N/A Start, start+wait, check+wait

This opcode will allow the start of a burnoff from the controller.

BRANCH

True Step Number False Step Number N/A

The Branch opcode can change program flow based upon an inquiry opcode. The True Step Number is the program step to go to if the inquiry is evaluated as true; and the False Step Number is the program step to go to if the inquiry is evaluated as false.

The True Step Number ranges from 1 – 24.

The False Step Number ranges from 1 – 24.

CC_SP_L

Setpoint Lower Limit Setpoint Upper Limit N/A

The Cascade Setpoint Limit opcode will allow the use to set the upper and lower limits for the cascade setpoint. The temperature data is the lower limit, and the atmosphere data is the upper limit.

DELAY

N/A N/A Delay Time

This opcode is used when a short delay is needed. The option value is the delay time in seconds, from 1-500 seconds.

DEV_AL

Temperature Dev/Band Atmosphere Dev/Band Loop

The deviation alarm opcode is used to turn the temperature or vacuum deviation alarms ON or OFF.

The Temperature Dev/ Band will determine the deviation band for the temperature deviation alarm. The Loop will determine which type of deviation alarm to use.

The Temperature Dev/Band ranges from -301 (Disable) – 30000.

The Loop options are: Off, T. Bnd (Temperature Band), A. Bnd (Atmosphere Band), A. Bnd, T. Bnd (Atmosphere Band and Temperature Band), T. + Dev (Temperature + Deviation), T. – Dev (Temperature – Deviation), A. Bnd, T. + Dev (Atmosphere Band and Temperature + Deviation), A. Bnd, T. – Dev (Atmosphere Band and Temperature – Deviation), A. + Dev (Atmosphere + Deviation), A. + Dev, T. Bnd (Atmosphere + Deviation and Temperature Band), A. + Dev, T. + Dev (Atmosphere + Deviation and Temperature + Deviation), A. + Dev, T. – Dev (Atmosphere + Deviation and Temperature – Deviation), A. – Dev (Atmosphere – Deviation), A. – Dev, T. Bnd (Atmosphere – Deviation and Temperature Band), A. – Dev, T. + Dev (Atmosphere – Deviation and Temperature + Deviation), A. – Dev, T. – Dev (Atmosphere – Deviation and Temperature – Deviation). There is also an option for Smart Temp and Smart Atm.

The band limit can be changed by the SET_WAIT opcode.

DOW_INQ

N/A N/A Day

This opcode checks the real time clock for the day of the week. This is useful for performing operations on a weekly basis on a specific day.

The Day is the day of the week, i.e. Sunday, Monday, Tuesday, Wednesday, Thursday, Friday, or Saturday.

EVT_IN

Temperature Setpoint Atmosphere Setpoint Event

This opcode waits for an input event to be turned ON or OFF depending on the Event value selected.

If the Temperature Setpoint is specified, it is considered a set point and will be sent to the appropriate controller.

The Temperature Setpoint ranges from -301 (Disable) – 30000.

The Atmosphere Setpoint ranges from -0.01 to 99.99.

The Event options are: Event 0 ON/OFF – Event 31 ON/OFF.

EVT_OUT

Temperature Setpoint N/A Event

This opcode waits for an output event to be turned ON or OFF depending on the Event value selected.

If the Temperature Setpoint is specified, it is considered a set point and will be sent to the appropriate controller.

The Temperature Setpoint ranges from -301 (Disable) – 30000.

The Event options are: Event 0 ON/OFF – Event 15 ON/OFF.

G_SOAK

N/A Wait Limit Soak Time

This is a guaranteed soak opcode. The temperature process value must be within the deviation band to allow the soak timer to run. If the temperature process value goes out of the deviation band, then the soak timer will stop and wait until the temperature process value comes back into the deviation band before starting up again.

The Wait Limit is the wait time, in Hours: Minutes format, for the wait limit. The Hours range from 0 – 533, and the Minutes range from 0 – 59.

The Soak time is the total time, in Hours:Minutes format, for the soak to run. The Hours range from 0 – 166, and the Minutes range from 0 – 59.

The band limit can be changed by the SET_WAIT opcode.

GDELAY

N/A N/A Delay Time

This opcode is a guaranteed short delay. It guarantees on the temperature loop unless the load TCs are enabled, in which case it guarantees against the load TC map for the specified number of seconds.

The Delay Time is from 1 – 500 seconds.

GHDELAY

N/A N/A Delay Time

This opcode is a guaranteed high short delay opcode. The temperature process value must be below the high limit deviation band to allow the delay timer to run. If the temperature process value goes out of the deviation band, then the delay timer will stop and wait until the temperature process value comes back into the deviation band before starting up again.

The Delay Time is from 1 – 500 seconds.

GHSOAK

N/A Wait Limit Soak Time

This is a guaranteed soak high opcode. The temperature process value must be below the deviation band to allow the soak timer to run. If the temperature process value goes out of the deviation band, then the soak timer will stop and wait until the temperature process value comes back into the deviation band before starting up again.

The Wait Limit is the wait time, in Hours: Minutes format, for the wait limit. The Hours range from 0 – 167, and the Minutes range from 0 – 59.

The Soak time is the total time, in Hours:Minutes format, for the soak to run. The Hours range from 0 – 166, and the Minutes range from 0 – 59.

The band limit can be changed by the SET_WAIT opcode.

GHZDELAY

N/A N/A Delay Time

This is a guaranteed high short delay opcode for a zone. The temperature process value must be below the high limit deviation band to allow the delay timer to run. If the temperature process value goes out of the deviation band, then the delay timer will stop and wait until the temperature process value comes back into the deviation band before starting up again.

The Delay Time is from 1 – 500 seconds.

GHZSOAK

N/A Wait Limit Soak Time

This is a guaranteed soak high opcode for a zone. The temperature process value must be below the high limit deviation band to allow the soak timer to run. If the temperature process value goes out of the deviation band, then the soak timer will stop and wait until the temperature process value comes back into the deviation band before starting up again.

The Wait Limit is the wait time, in Hours: Minutes format, for the wait limit. The Hours range from 0 – 533, and the Minutes range from 0 – 59.

The Soak time is the total time, in Hours:Minutes format, for the soak to run. The Hours range from 0 – 166, and the Minutes range from 0 – 59.

The band limit can be changed by the SET_WAIT opcode.

GLDELAY

N/A N/A Delay Time

This opcode is a guaranteed low short delay opcode. The temperature process value must be above the lower limit deviation band to allow the delay timer to run. If the temperature process value goes out of the deviation band, then the delay timer will stop and wait until the temperature process value comes back into the deviation band before starting up again.

The Delay Time is from 1 – 500 seconds.

GLSOAK

N/A Wait Limit Soak Time

This is a guaranteed soak low opcode. The temperature process value must be above the lower limit deviation band to allow the soak timer to run. If the temperature process value goes out of the deviation band, then the soak timer will stop and wait until the temperature process value comes back into the deviation band before starting up again.

The Wait Limit is the wait time, in Hours: Minutes format, for the wait limit. The Hours range from 0 – 533, and the Minutes range from 0 – 59.

The Soak time is the total time, in Hours:Minutes format, for the soak to run. The Hours range from 0 – 166, and the Minutes range from 0 – 59.

The band limit can be changed by the SET_WAIT opcode.

GLZDELAY

N/A N/A Delay Time

This is a guaranteed low short delay opcode for a zone. The temperature process value must be below the deviation band to allow the delay timer to run. If the temperature process value goes out of the deviation band, then the delay timer will stop and wait until the temperature process value comes back into the deviation band before starting up again.

The Delay Time is from 1 – 500 seconds.

GLZSOAK

N/A Wait Limit Soak Time

This is a guaranteed soak low opcode for a zone. The temperature process value must be above the lower limit deviation band to allow the soak timer to run. If the temperature process value goes out of the deviation band, then the soak timer will stop and wait until the temperature process value comes back into the deviation band before starting up again.

The Wait Limit is the wait time, in Hours: Minutes format, for the wait limit. The Hours range from 0 – 533, and the Minutes range from 0 – 59.

The Soak time is the total time, in Hours:Minutes format, for the soak to run. The Hours range from 0 – 166, and the Minutes range from 0 – 59.

The band limit can be changed by the SET_WAIT opcode.

GOSUB

N/A N/A Recipe Number

The go to subroutine opcode is used to call a program to run and then return to the calling program. This is used to execute standard routines that can be used by many programs. GOSUBs can be stacked up to eight (8) levels.

The Recipe Number is the recipe (program) to run. The range is 1 – 300.

GRAMP

Temperature Setpoint Atmosphere Setpoint Time

This is a guaranteed ramp opcode. The process value must be within the deviation band to allow the ramp timer to run. If the process value goes out of the deviation band, then the ramp timer will stop and wait until the process value comes back into the deviation band before starting up again.

The Temperature Setpoint is the setpoint to send for the temperature process variable. The range is -301 (disable) – 30000.

The Atmosphere setpoint is the setpoint to send for the atmosphere process variable. The range is -0.01 to 99.99.

The Time is the total time for the program to reach the desired setpoint(s), in Hours:Minutes format. The Hours range from 0 – 166, and the Minutes range from 0 – 59.

The band limit can be changed by the SET_WAIT opcode.

GTCINQDEL

Delay Time T/C Option

This is a guaranteed TC inquiry short delay opcode. It is used to verify that all active thermocouples are within the set wait limits around the setpoint for the user defined time period.

The Delay Time is the time in seconds before checking the T/Cs. The range is 0 – 500.

The T/C is the Control T/C or Load T/C to use. The options are: Control T/C, T/C 1 – T/C 24.

The Option will allow the user to wait for the T/Cs to come within the set wait limits around the setpoint. The options are: Wait, Wait Up, or Wait Down.

GZ_SOAK

N/A N/A Soak Time

This is a guaranteed soak opcode for a zone. The temperature process value must be within the deviation band to allow the soak timer to run. If the temperature process value goes out of the deviation band, then the soak timer will stop and wait until the temperature process value comes back into the deviation band before starting up again.

The Soak time is the total time, in Hours:Minutes format, for the soak to run. The Hours range from 0 – 166, and the Minutes range from 0 – 59.

The band limit can be changed by the SET_WAIT opcode.

GZDELAY

N/A N/A Delay Time

This is a guaranteed short delay opcode for a zone. The temperature process value must be within the deviation band to allow the delay timer to run. If the temperature process value goes out of the deviation band, then the soak timer will stop and wait until the temperature process value comes back into the deviation band before starting up again.

The Delay Time is from 1 – 500 seconds.

GZRAMP

Temperature Setpoint Atmosphere Setpoint Time

This is a guaranteed ramp opcode for a zone. The process value must be within the deviation band to allow the ramp timer to run. If the temperature process value goes out of the deviation band, then the ramp timer will stop and wait until the temperature process value comes back into the deviation band before starting up again.

The Temperature Setpoint is the setpoint to send for the temperature process variable. The range is -301 (disable) to 30000.

The Time is the total time for the program to reach the desired setpoint(s), in Hours:Minutes format. The Hours range from 0 – 166, and the Minutes range from 0 – 59.

The band limit can be changed by the SET_WAIT opcode.

HIGH_AL

Temperature Setpoint Atmosphere Setpoint N/A

This opcode is used to enable a high limit alarm on the temperature or atmosphere process. This alarm remains active until the program ends.

The Temperature Setpoint is the setpoint to send for the temperature process variable. The range is -301 (disable) to 30000.

The Atmosphere Setpoint is the setpoint to send for the atmosphere process variable. The range is -0.01 (disable) to 99.99.

HIGH_PO

Temperature PO Value Atmosphere PO Value N/A

This opcode is used to enable a high limit alarm on the temperature or atmosphere percent output.

The Temperature PO Value is the high limit point for the temperature percent output. The range is -101 (disable) – 100.

The Atmosphere PO Value is the high limit point for the atmosphere percent output. The range is -101 (disable) – 100.

This alarm remains active until the program ends.

ID_INC

N/A N/A N/A

This opcode increments the integer ID number by one.

ID_INQ

ID Number Value N/A Option

This opcode is used to compare the ID value to the value in the temperature data. The LIMIT opcode immediately following this opcode sets a time limit on the wait. A BRANCH opcode immediately following this opcode can be used to change the program flow based on the inquiry results.

The ID Number Value is the ID to compare. The range is -301 (disable) – 30000.

The Option will determine how to compare the ID value against the value in the temperature data. The options are: Equal, High, or Low.

ID_SET

ID Number Value N/A N/A

This opcode is used to set the ID number to the value specified in the temperature data. The ID number is provided as a feature to track loads or jobs, and it is not used by any controller.

The ID Number Value is the value to set. The range is -301 (disable) – 30000.

IN_INQ

Input Value Input Option

This opcode will check a specific input against a specified value and can hold until the input matches the value.

The Input Value is the value to check against. The range is -301 (disable) – 30000.

The Input is the specific input to check. The range is 1 – 3.

The options are: Wait, Wait Up, or Wait Down.

JUMP

N/A N/A Recipe Number

The JUMP opcode is used to go to another program when no return is needed. The difference between a JUMP and a GOSUB is that GOSUB will return to the original program when the called program completes. A JUMP will not return to the original program.

The Recipe Number is the recipe number to go to. The range is 1 – 300.

LIMIT

N/A N/A Time Limit

This option is used to place a time limit on a wait or inquiry step. The pass step number is the next step executed if the condition is satisfied before the LIMIT timeout occurs and the fail step is the next step executed if the limit time is exceeded. Optionally, a user alarm value may be provided which will activate the specified programmer user alarm in the event of a limit failure.

The Time Limit is the total time, in Hours:Minutes format, for the program to wait. The Hours range from 0 – 8, and the Minutes range from 0 – 59.

LOW_AL

Temperature Setpoint Atmosphere Setpoint N/A

This opcode is used to enable a low limit alarm on the temperature or atmosphere. This alarm remains active until the program ends.

The Temperature Setpoint is the setpoint to send for the temperature process variable. The range is -301 (disable) – 30000.

The Atmosphere Setpoint is the setpoint to send for the atmosphere process variable. The range is -0.01 (disable) to 99.99.

LOW_PO

Temperature PO Value Atmosphere PO Value N/A

This opcode is used to enable a low limit alarm on the temperature or atmosphere percent output.

The Temperature PO Value is the high limit point for the temperature percent output. The range is -101 (disable) to 100.

The Atmosphere PO Value is the high limit point for the temperature percent output. The range is -101 (disable) to 100.

This alarm remains active until the program ends.

LTC_SET

T/C Map T/C Map Load TC Enable

This opcode sets the active load T/C map for the furnace. Checking the box next to the T/C number selects the T/C. The options are off, on, or on + alarms.

This Opcode is the same as Zone/Load TC Setup via the Menu options (see sections on Zone/Load TC Setup) except that it selects thermocouples from the recipe. This may be helpful when certain recipes require three Load TCs and other require six Load TCs.

NOTE: Only TCs selected in the Load TC Map will be available here. See the Configuration section for more details.

MEVT_IN_0

Temperature Setpoint Event Mask Event ON/OFF Bitmap

This opcode waits for multiple input events 0 through 15.

The Temperature Setpoint is an optional setpoint to send down. The range is -301 (disable) – 30000.

The Event Mask is the events to enable, which is the events affected. The options are: 0 – 15.

The Event ON/OFF Bitmap field will allow the user to select the bitmap for the event ON/OFF, which will set the final condition of the events in the event mask. The opcode ignores the bits not in the enabled events and waits on the bits specified in the bitmap. The options are: 0 – 15.

MEVT_IN_1

Temperature Setpoint Event Mask Event ON/OFF Bitmap

This opcode waits for multiple input events 16 through 31.

The Temperature Setpoint is an optional setpoint to send down. The range is -301 (disable) – 30000.

The Event Mask is the events to enable, which is the events affected. The options are: 0 – 15. Note – Even though the events listed are 0 – 15, they correspond to 16 – 31.

MEVT_OUT_0

Temperature Setpoint Event Mask Event ON/OFF Bitmap

This opcode will set multiple output events 0 through 15.

The Temperature Setpoint is an optional setpoint to send down. The range is -301 (disable) – 30000.

The Event Mask is the events to enable, which is the events affected. The options are: 0 – 15.

The Event ON/OFF Bitmap field will set the final condition of the events in the event mask. The opcode will ignore the bits not in the mask and either set or reset the bits depending upon their states in the bitmap. The options are: 0 – 15.

MEVT_OUT_1

Temperature Setpoint Event Mask Event ON/OFF Bitmap

This opcode will set multiple output events 16 through 31.

The Temperature Setpoint is an optional setpoint to send down. The range is -301 (disable) – 30000.

The Event Mask is the events to enable, which is the events affected. The options are: 0 – 15. Note – Even though the events listed are 0 – 15, they correspond to 16 – 31.

MEVT_OUT_2

Temperature Setpoint Event Mask Event ON/OFF Bitmap

This opcode will set multiple output events 32 through 47.

The Temperature Setpoint is an optional setpoint to send down. The range is -301 (disable) – 30000.

The Event Mask is the events to enable, which is the events affected. The options are: 0 – 15. Note – Even though the events listed are 0 – 15, they correspond to 32 – 47.

MV_INQ

N/A Millivolt Level Option

The millivolt inquiry is used to wait for the probe millivolts to reach the value specified in the atmosphere data. The range is -1 to 9999.

The LIMIT opcode immediately following this opcode sets a time limit on the wait.

A BRANCH opcode immediately following this opcode can be used to change the program flow based on the inquiry results.

NO-OP

N/A N/A N/A

This is a no operation code, and it does nothing. It is used as a place holder on programs that are less than 24 steps.

O2_ALARM

N/A N/A On/Off Option

If this option is turned on in a recipe, at any point after this Opcode if the %O2 gets above 1%, an alarm will be present on the screen, and is assignable to a relay output. If the Option is set to On, the alarm is enabled. If the Option is set to Off, the alarm is disabled.

O2_TEST

True Step Number False Step Number Wait Time (Minutes)

This Opcode tests to see if the %O2 is below 1%. The wait time (set in Wait Time) is the maximum amount of time it can sit in this step trying to see if it is true (below 1%) or false (above 1%). If true, it jumps to the step designated in True Step Number. If false, it jumps to the step designated in False Step Number.

OG_HOLDT

N/A Torr Level Option

This opcode will monitor the vacuum level a setpoint to keep the vacuum level under a certain point. When the actual vacuum level is at or above the setpoint, the recipe will be put in a hold. This Opcode can be placed at any location within the recipe and remains active until (1) another gauge is selected, (2) the Level Option of OFF is selected or (3) the program ends. When the vacuum falls below the setpoint, the hold will be removed.

The gauge can be changed during a cycle or turned off completely but the programmer can only monitor one vacuum gauge at a time.

Torr Level is the vacuum setpoint in Torr.

OGHOLDM

N/A Micron Level Option

The gauge can be changed during a cycle or turned off completely but the programmer can only monitor one vacuum gauge at a time.

Micron Level is the vacuum setpoint in Micron.

PIDLOAD

Loop 2 Loop 1 Loop 3

This opcode will load an alternate PID set from the controller memory.

The Loop 1 field is the alternate PID loop to use for loop 1. A value of 0 will disable the loop PID. The range is 0 – 16.

The Loop 2 field is the alternate PID loop to use for loop 2. A value of 0 will disable the loop PID. The range is 0 – 16.

The Loop 3 field is the alternate PID loop to use for loop 3. A value of 0 will disable the loop PID. The range is 0 – 16.

The alternate PID loops can be set up on the Alternate PID Setup screen. See the Alternate PID Setup section for more information.

NOTE: The feature of PID Auto Switch is disabled for the entire duration of a recipe when the opcode PIDLOAD is executed. See the PID Loop Setup section for more information.

PLC_SET_VAL

Value Write Location Option

This opcode will set specially configured values in a Client PLC. Registers to be written to must be described via the Configurator’s Recipe Management Group Opcode Control interface. The temperature data is the value to write. The atmosphere data is the Write location. This can be:

Quench SP

Endo SP

Ammonia SP

N2 SP

Methanol SP

Quench Sec

Drain Sec

T.C. Endo SP

T.C. N2 SP

FNC NH3 SP

T.C. Time

PLC Quench SP

Quench Type

The options are: Wait, Wait up, or Wait Down.

PO_INQ

Temperature PO Value Atmosphere PO Value Option

The percent output inquiry is used to test the actual percent output of the temperature controller.

The Temperature PO Value is the temperature percent output to test against. The range is -101 (disable) – 100.

The Atmosphere PO Value is the atmosphere percent output to test against. The range is -101 (disable) – 100.

The Option value will determine how the test will conclude. The options are: Wait (Reach within band), Wait Up (Reach or Exceed the specified values), or Wait Down (Reach or Be Less than the specified values).

The LIMIT opcode immediately following this opcode sets a time limit on the wait.

A BRANCH opcode immediately following this opcode can be used to change the program flow based on the inquiry results.

Q_TT_AL_SP

N/A Transfer Time (Seconds) N/A

This option will set the quench transfer time alarm setpoint.

The Transfer time is entered in seconds. The range is 0.0 – 3276.7.

QTCSET

Temperature Setpoint N/A N/A

This is the quench setpoint opcode. The Temperature Setpoint is the setpoint for a quench cycle. The range is -301 (disable) – 30000.

QUENCH

Temperature Time Speed

This opcode is used to start a quench cycle. The quench cycle is independent of any program that is running. A new recipe can be started while the quench timer is active.

The Temperature is the quench temperature controller set point. The quench temperature controller must be defined as a Client instrument in the Client Instrument Setup menu and configured in the Furnace Setup menu as Instrument # 4. The range is -301 (disable) – 30000.

The quench cycle starts when the opcode is executed. The set point is sent to the quench temperature controller, the timer is started, and the high-speed event is turned on if it is selected. Once the quench timer has timed out, the quench speed changes to an idle speed, and the end of quench cycle event pulses on and off.

The Time is the quench time in minutes. The range is -1 (disable) – 9999.

The Speed is used to trigger an Event (#6, by default, which can be changed in the Furnace Setup menu).

While this quench cycle is active, there are three events that can be triggered:

Quench speed event (Default: #6)
Quench run event (Default: #0)
End of quench event (Default: #7)

All of these events must be configured in the Furnace Setup menu.

Quench Speed Event

While the quench timer is active, if a high speed was selected, the quench speed event will be on. This Event can control the agitator speed, high or low. This Event will remain off if the quench speed is set to low.

Quench Run Event

While the quench timer is active, the Quench Run Event is on.

End of Quench Event

When the End of Quench Alarm is activated at the end of the quench cycle, the user must acknowledge the alarm. While the End of Quench Alarm is active, the End of Quench Event will be on.

RAMP

Temperature Setpoint Atmosphere Setpoint Time

This opcode changes the temperature set point linearly over time.

The Temperature Setpoint is the setpoint to send for the temperature process variable. The range is -301 (disable) to 30000.

The Atmosphere setpoint is the setpoint to send for the atmosphere process variable. The range is -0.01 to 99.99.

The Time is the total time for the program to reach the desired setpoint(s), in Hours:Minutes format. The Hours range from 0 – 166, and the Minutes range from 0 – 59.

The band limit can be changed by the SET_WAIT opcode.

RAMP_VALVE

Final Set Point Ramp Rate Valve

This opcode ramps a valve setpoint.

The Final Set Point is the final setpoint for the ramped valve. The range is -301 (disable) to 30000.

The Ramp Rate is which of the four valves to ramp.

Valve is the valve number.

This opcode does not wait for the ramp to complete. The ramp occurs in the background with a new setpoint calculated every 10 seconds. Therefore, all four valves can be ramped independently. The TEST_VRAMP opcode can be used to determine if the ramp completed.

RAMPR

Temperature Setpoint Option Decimal Rate

This opcode changes the temperature set point at a rate of degrees per minute.

The Temperature Setpoint is the setpoint to send for the temperature process variable. The range is -301 (disable) – 30000.

The Option Decimal will alter the decimal point in the rate. The range is -1 (disable) – 2.

The Rate will be the rate of degrees per minute to change the temperature until the setpoint is reached. The range is 0.01 – 300.00.

REG_INQ

Value Register Option

This opcode will check a specific register against a specified value and can hold until the input matches the value.

The Value is the value to check against. The range is -301 (disable) – 32767.

The Register is the specific register to check. The range is -1 (disable) – 32767.

The options are: Equal, > Or Equal (Greater than or equal to), or < Or Equal (Less than or equal to).

RESET

Recipe Number Recipe Step N/A

This opcode is used to clear all stacks and timers and start a program. The RESET is useful in a weekend shut down program to restart the normal operating program.

The Recipe Number is the program number to start once everything has been reset. The range is 1 – 300.

The Recipe Step is the step number in the program to start at. The range is 1 – 24.

RLY_INQ

Off step number On step number Option

The relay inquiry is used to check the relays using the relay setpoint RLY_SP_M or RLY_SP_T opcodes. This Opcode must immediately follow a Relay Setpoint Opcode.

The Off step number determines what the next recipe step will be when this Relay Setpoint is off. The On step number determines what the next recipe step will be when this Relay Setpoint is on.

The Option value will determine which vacuum relay is selected. If the relay is ON, the program moves to the ON step number. If the relay is OFF, the program moves to the OFF step number.

The LIMIT opcode immediately following this opcode sets a time limit on the wait.

A BRANCH opcode immediately following this opcode can be used to change the program flow based on the inquiry results.

RLY_SP_M

Off setpoint On setpoint Option

This opcode determines the relay setpoint in microns to be used in conjunction with the RLY_INQ Opcode and must precede the RLY_INQ.

The options are used to select the gauge and setpoint.

RLY _SP_T

Off setpoint On setpoint Option

This opcode determines the relay setpoint in Torr to be used in conjunction with the RLY_INQ Opcode and must precede the RLY_INQ.

The options are used to select the gauge and setpoint.

RUN_Client

Recipe Number Recipe Step Client Instrument

This opcode will start a recipe on the specified Client SSI recipe programmer instrument.

The Recipe Number is the program number to start on the Client instrument. The range is 1 – 300.

The Recipe Step is the program step to start on in the Client instrument. The range is 1 – 24.

The Client Instrument is the Client instrument to select to start the recipe on (SSi recipe programmers only). The options are: 1 – 25.

SET_AUX

Setpoint Value N/A Client Instrument

This opcode sends a setpoint down to an auxiliary instrument.

The Setpoint Value is the setpoint to send down. The range is -301 (disable) – 30000.

The Client Instrument is the Client instrument to send the setpoint down to (SSi recipe programmers only). The options are: 1 – 25.

SET_COF_TBL

N/A N/A Table Number

This opcode Sets the table number of the COF adjustment table from 1 to 8. It can also be used to turn off the table usage.

The option value of the opcode is the table number (1 through 8) or 0 to disable.

This opcode only changes the COF table setting if the controller is in %C mode.

SET_FACT

N/A CO/H Factor N/A

This opcode is used to set the CO factor or the H₂ factor of the atmosphere controller. If the atmosphere type for the loop is set to dew point then the H₂ factor is set; otherwise the CO factor is set. The temperature data is not used. The atmosphere data is used as the factor with decimal places ignored.

The range for the CO/H factor is -1 to 9999.

SET_FCM

N/A N/A Mode

This opcode sets the gas flow control mode. There are four options: Individual trim, Flow control adjusts two valves, Ratio control – Maintains constant ratio between NH₃ +, Auto switch – Switches between Options 1 & 2 based on the DA switch point.

Individual Trim will adjust the Gas flow of a valve if Trim is enabled.
Flow Control adjusts the flows of all enabled valves by the same percentage.
Ratio Control maintains a constant total flow of gas into the furnace by adjusting only the Ammonia and Dissociated Ammonia flows. This does not apply to the Nitrogen or Aux Valves.

SET_GEN_FLOW

Multiplier (optional) Air/Gas Ratio (optional) Total Endo Flow

This opcode will set the flow rate.

The Multiplier is the multiplier for the flow. The range is -3.01 (disable) – 3.20.

The Air/Gas Ratio is the ratio for the air and gas. The range is -0.01 (disable) – 0.10.

The Total Endo Flow is the total flow rate. The range is 0 – 32000.

SET_LP3

Setpoint N/A N/A

This opcode will set the Loop 3 setpoint, if applicable. The temperature data is the setpoint. Set Loop 3 functionality is similar to the SET_BP opcode, except that there is no decimal place applied on Set Loop 3.

SET_SL_VAL

Value Register Instrument

This option will send a value from a register to a specific instrument.

The Value is the value to send. The range is -32768 – 32767.

The Register is the register to send to. The range is 0 – 32767.

The Instrument is the Client instrument to send the value to. The options are: 1 – 25.

SET_V_TRACK

Tracking % Tracking Mode Valve

This opcode only applies to valve 3 or valve 4. The Valve option must specify which valve.

Tracking % specifies the tracking percentage.

Tracking Mode specifies the setpoint tracking mode. 0 is no tracking, 1 is track total flow, and 2 is track NH₃ flow.

Valve is which of the four valves will be tracked.

SET_VALVE

Setpoint Trim Range Valve

This opcode will set one of four valves. The temperature data is the setpoint. The atmosphere data is the trim range. Setting the trim range to any positive number will enable the trim for the selected valve.

Setting the trim range to a 0 will disable the trim for the selected valve. Note: leaving the trim disabled will make no changes to the current trim configuration. The option data is the valve section. The valve can be: Nitrogen, Ammonia, Disassociated Ammonia, or Endo.

SET_WAIT

Temperature Setpoint Atmosphere Setpoint Speed

This opcode sets the band limits for the wait option or inquiry opcodes.

The Temperature Setpoint specifies the temperature band (i.e. +/- the value). The range is -301 (disable) to 30000.

The Atmosphere setpoint specifies the atmosphere band (i.e. +/- the value). The range is -0.01 to 99.99.

The Speed is the speed to use: Ctrl + Load (T/C), Control (T/C), or Load (T/C).

SETPT

Temperature Setpoint N/A Option

This opcode is used to set the temperature set point.

The Temperature Setpoint is the setpoint to send for the temperature process variable. The range is -301 (disable) – 30000.

The Option will wait for the setpoints to be reached: Blank (Don’t Wait), Wait, Wait Up, or Wait Down. Note – The Blank option is an actual blank line, not the word “Blank”.

SL_PV_INQ

Process Variable Client Option

This opcode will check a Client instrument for a specific process variable value, and wait until the PV from the Client instrument matches.

The Process Variable is the PV to check. The range is -301 (disable) – 32000.

The Client is the Client instrument to check. The range is 1 – 12.

The Option is the wait options for the opcode. The options are: Wait, Wait Up, or Wait Down.

SOAK

N/A N/A Soak Time

This opcode is an unconditional soak for the time (in hours and minutes) specified. The programmer will hold for the time specified, and nothing except the operator pausing the recipe will put the program in a hold state.

The Soak time is the total time, in Hours:Minutes format, for the soak to run. The Hours range from 0 – 166, and the Minutes range from 0 – 59.

TC_CHK

Source 1 Source 2 Source 3

This opcode will check a TC

Source 1 will determine the first source to check. The options are: Not Used, Instrument 1 – Instrument 25, and Input 1 – Input 3.

Source 2 will determine the second source to check. The options are: Not Used, Instrument 1 – Instrument 25, and Input 1 – Input 3.

Source 3 will determine the third source to check. The options are: Not Used, Instrument 1 – Instrument 25, and Input 1 – Input 3.

TC_INQ

Temperature Level N/A Option

The temperature inquiry is used to wait for the actual control temperature to reach the value specified.

The Temperature Level is the specified level to wait for. The range is -301 (disable) to 30000.

The Option is the wait options: Wait, Wait Up, or Wait Down.

The default band can be set under the Configuration Menu and is typically 15 degrees. The band limit can be changed by the SET_WAIT opcode.

The LIMIT opcode immediately following this opcode sets a time limit on the wait.

A BRANCH opcode immediately following this opcode can be used to change the program flow based on the inquiry results.

TEST_VRAMP

Step if not ramping Step if ramping Valve to test

This opcode is used to determine is a valve setpoint ramp has completed. The valve setpoint ramp is set using the RAMP_VALVE opcode.

The Valve to test option determines which valve to test.

If no ramp is occurring on that valve, then the program continues at the step specified in the Step if not ramping option.

If a ramp is occurring on that valve, then the program continues at the step specified in the Step if ramping option.

timeEVT

N/A Delay Time Option

This opcode will turn ON or OFF a specified event for the specified amount of time.

The Delay Time is the time in seconds. The range is: 0 – 500.

The Option is the event to turn ON or OFF. The options are: Event 0 ON or OFF – Event 31 ON or OFF.

TOD_INQ

N/A N/A Time

This opcode is a time of day inquiry that would be used to start a process or subroutine at a specific hour and minute.

The Time is the time to check, in Hours:Minutes format. The Hours range from 0 – 23, and the Minutes range from 0 – 59.

TZ_INQ

Temperature Level N/A Option

The zone temperature inquiry is used to wait for the actual control zone temperature to reach the value specified.

The Temperature Level is the specified level to wait for. The range is -301 (disable) – 30000.

The Option is the wait options: Wait, Wait Up, or Wait Down.

The default band can be set under the Configuration Menu and is typically 15 degrees. The band limit can be changed by the SET_WAIT opcode.

The LIMIT opcode immediately following this opcode sets a time limit on the wait. A BRANCH opcode immediately following this opcode can be used to change the program flow based on the inquiry results.

This opcode is identical to the TC_INQ opcode, except that it will deal with zones.

VAC_INQ_M_1-4

N/A Micron Level Option

The vacuum inquiry is used to determine the vacuum value of the gauge (1-4) being tested.

The Micron Level is the vacuum level in microns that the actual value will be compared to.

The LIMIT opcode immediately following this opcode sets a time limit on the wait.

A BRANCH opcode immediately following this opcode can be used to change the program flow based on the inquiry results.

VAC_INQ_T_1-4

N/A Torr Level Option

The vacuum inquiry is used to determine the vacuum value of the gauge (1-4) being tested.

The Torr Level is the vacuum level in Torr that the actual value will be compared to.

The LIMIT opcode immediately following this opcode sets a time limit on the wait.

A BRANCH opcode immediately following this opcode can be used to change the program flow based on the inquiry results.

Z_SETPT

Temperature Setpoint Atmosphere Setpoint Option

This opcode is used to set the temperature or atmosphere set point for a zone.

The Temperature Setpoint is the setpoint to send for the temperature process variable. The range is -301 (disable) to 30000.

The atmosphere Setpoint is the setpoint to send for the atmosphere process variable. The range is -0.01 to 99.99.

The Option will wait for the setpoints to be reached: Blank (Don’t Wait), Wait, Wait Up, or Wait Down. Note – The Blank option is an actual blank line, not the word “Blank”.

ZONE_OFF

Temperature Value Atmosphere Value Zone

The Zone Offset opcode is used to set a temperature or atmosphere offset to be added to the set point sent to a specific zone. The same loop (furnace) can have different offsets for each zone. The zones must be defined in the zone configuration.

For example, a pit furnace has three zones: top, middle, and bottom.

The zones could be defined as:

top = zone 1
middle = zone 2
bottom = zone 3

If the ZONE_OFF opcode is used in a program with Temperature Value = 50 and Zone = 1 and a setpoint of 1700, then:

A set point of 1750 would be sent to the top zone (Zone 1)
A set point of 1700 would be sent to the middle zone (Zone 2)
A set point of 1700 would be sent to the bottom zone (Zone 3)

The Temperature value is the offset value to send to the specified zone. The range is -301 (disable) – 30000.

The Atmosphere value is the offset value to send to the specified zone. The range is -0.01 to 99.99.

The Zone is the specific zone to send the offsets to. The options are: Zone 1 – Zone 5.